Effect of substrate temperature and deposition rate on the photoconductivity of sputtered a-Si : H

نویسندگان

  • H. Hamdi
  • A. Deneuville
  • J. C. Bruyere
  • C. Bruyère
چکیده

2014 The variation of the photoconductivity versus photon energy is reported for samples deposited at 150 °C, 190 °C and 250 °C at low (30 Å/min.) and high (~ 150 Å/min.) deposition rates. The spin densities of the same samples are also reported. Taking into account the hydrogen concentration and distribution in these samples, a model according to the photoconductivity is mainly limited by the density and depth of shallow traps originating from hydrogen independent matrix defects is proposed. J. Physique LETTRES 41 (1980) L-483 L-486

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تاریخ انتشار 2016